Abstract:
The effect of electron and proton irradiation temperature on the formation of radiation defects in $4H$-$\mathrm{SiC}$ Schottky diodes was studied using low-temperature photoluminescence spectroscopy. It has been established that the temperature at which irradiation is carried out significantly affects the formation of radiation defects in the base layer of $n$-$4H$-$\mathrm{SiC}$ diodes. This observation is in good agreement with the results of changes in the electrical properties of the same samples under the influence of proton and electron irradiation.
Keywords:$4H$-$\mathrm{SiC}$ Schottky diode, proton irradiation, electron irradiation, photoluminescence, electrical properties.