Abstract:
We have investigated the possibility of realizing the self-propagating combustion regime for a gaseous mixture of SiH$_4$–NH$_3$–Î$_2$ and SiH$_4$–2 with an oxygen content of 0–2%. Calculation of the equilibrium composition indicates the possibility that the target products Si and Si$_3$N$_4$ are formed. We have established experimentally that propagation of the chemical reaction front in the self-sustaining regime with formation of the above-indicated products occurs only in the presence of oxygen. We show that chemical induction, leading to consumption of up to 60% of the initial monosilane, is a chain reaction.
