RUS
ENG
Full version
JOURNALS
// Doklady Akademii Nauk
// Archive
Dokl. Akad. Nauk SSSR,
1991
Volume 318,
Number 5,
Pages
1154–1158
(Mi dan49176)
PHYSICS
Exact solution of inverse problem of ellipsometry for absorbing films
S. N. Svitasheva
Institute of Semiconductor Physics of USSR Academy of Sciences, Siberian Branch, Novosibirsk
UDC:
535.39
Presented:
A. V. Rzhanov
Received: 11.01.1991
Fulltext:
PDF file (280 kB)
©
Steklov Math. Inst. of RAS
, 2026