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JOURNALS // Doklady Akademii Nauk // Archive

Dokl. Akad. Nauk SSSR, 1991 Volume 318, Number 5, Pages 1154–1158 (Mi dan49176)

PHYSICS

Exact solution of inverse problem of ellipsometry for absorbing films

S. N. Svitasheva

Institute of Semiconductor Physics of USSR Academy of Sciences, Siberian Branch, Novosibirsk

UDC: 535.39

Presented: A. V. Rzhanov
Received: 11.01.1991



© Steklov Math. Inst. of RAS, 2026