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JOURNALS // Doklady Akademii Nauk // Archive

Dokl. Akad. Nauk SSSR, 1973 Volume 213, Number 1, Pages 74–76 (Mi dan37907)

PHYSICS

On the theory of atomic displacement during ion implantation

V. V. Yudin


Presented: L. A. Artsimovich
Received: 01.02.1973



© Steklov Math. Inst. of RAS, 2026