MODELS IN PHYSICS AND TECHNOLOGY

Numerical simulation of charging processes at ferroelectric diagnostics with scanning electron microscopy techniques

A. V. Sivunov, A. G. Maslovskaya

Amur State University, 21 Ignatyevskoe Shosse, Blagoveshchensk, 675027, Amur region, Russia

Abstract: An algorithm of applied problem solving was described to calculate electrical characteristics of electrical field effects in ferroelectrics electron-beam charged. The algorithm was based on implementation of the deterministic model using finite element method as well as taking into account Monte-Carlo simulation results of electron transport. The program application was developed to perform computing experiments.

Keywords: algorithm, ferroelectric, electron irradiation, charging processes, finite element method, Monte-Carlo method.

UDC: 519.688:004.942

Received: 03.07.2013
Revised: 31.01.2014

DOI: 10.20537/2076-7633-2014-6-1-107-118