This article is cited in 3 papers

OPTO-IT

A microscope image processing method for analyzing TLIPSS structures

D. A. Belousov^a, A. V. Dostovalov^ab, V. P. Korolkov^a, S. L. Mikerin<sup>a

a</sup> Institute of Automation and Electrometry of the SB RAS, 630090, Novosibirsk, Russia, Acad. Koptyug Ave 1
^b Novosibirsk State University, 630090, Novosibirsk, Russia, Pirogova St. 2

Abstract: The paper describes a method for processing microimages of thermochemical laser-induced periodic surface structures (TLIPSS) to quantify their structural order and defects. Results of its application for the analysis of microimages of periodic structures formed in 30-nm chromium films by an astigmatically focused femtosecond Gaussian laser beam have been presented. Dependences of the relative area of the beam-modified region, the area of defects, and the ordering of the periodic structures on the scanning speed and the writing beam power have been obtained.

Keywords: digital image processing, microscope image processing, laser materials processing, laser-induced periodic surface structures.

Received: 25.03.2019
Accepted: 17.06.2019

DOI: 10.18287/2412-6179-2019-43-6-936-945