This article is cited in 1 paper

OPTO-IT

Monitoring a spatial distribution of transmitted and reflected light in a diffractive structure

D. A. Belousov, A. G. Poleshchuk, V. N. Khomutov

Institute of Automation & Electrometry Siberian Branch of the Russian Academy of Sciences, Novosibirsk, Russia

Abstract: We propose a method and a design of a device for an on-line monitoring of a spatial intensity distribution of transmitted and reflected diffraction orders found within a $\pm80^\circ$ solid angle and a $360^\circ$ azimuthal angle. The proposed device is intended to serve as a shape and depth profiler of the diffractive element microrelief in the course of manufacturing.

Keywords: diffractive optics, computer optics, diffractive optical elements (DOEs), synthesized holograms, measuring system.

Received: 11.08.2015
Revised: 06.11.2025

DOI: 10.18287/0134-2452-2015-39-5-678-686