This article is cited in 5 papers

OPTO-IT

Interferometric testing of steep cylindrical surfaces with on-axis CGHs

A. G. Poleshchuk^a, R. K. Nasyrov^a, J.-M. Asfour<sup>b

a</sup> Institute of Automation and Electrometry, Russian Academy of Sciences, Novosibirsk, Russia
^b Dioptic GmbH, Weinheim, Germany

Abstract: We present a new approach for testing cylindrical optical surfaces using a Null-test. We suggest using a Computer Generated Hologram (CGH) in combination with a Transmission Sphere. It is shown that in such an optical layout the period of the diffractive structure is larger than in the case of a conventional scheme using a collimated beam. Therefore, this kind of hologram enables the test of cylinder surfaces with higher numerical apertures.

Keywords: diffractive optical elements, computer-generated hologram (CGH), laser writing, methods for DOE fabrication, cylinder metrology surface testing.

Received: 31.12.2015
Accepted: 23.04.2016

Language: English

DOI: 10.18287/2412-6179-2016-40-5-625-628