The formation by RF magnetron sputtering on the upgraded setup the cathode-1m of multilayer structures ZnS/SiO₂

S. S. Alalykin, R. M. Zakirova, V. F. Kobziev, P. N. Krilov, I. V. Fedotova

Udmurt State University, Izhevsk, Russia

Abstract: The results of using the developed hardware-software complex for producing multilayer structures of ZnS/SiO₂ with specified thicknesses of layers are presented.

Keywords: RF magnetron sputtering, a hardware-software complex, multilayer structure ZnS/SiO₂.

UDC: 621.793.1