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Adyghe Int. Sci. J., 2025, Volume 25, Issue 2, Pages 25–36 (Mi aman111)

PHYSICS

Development and creation of basic components of vacuum microelectronics

M. D. Bavizheva, Bavizhev Zaur Ramazanovichb

a North Caucasus State Technical University
b Company Scientific and Production Enterprise “Radiy”

Abstract: The paper presents the results of a large-scale research work by a team of scientists from JSC NPP Radium and KBSU on the creation of prototypes of autoemission cathodes, grid assemblies and a mock-up of a vacuum microtriode as basic components of vacuum microelectronics and the study of their parameters. The design of the model includes a cathode with an autoemission film made in the form of a selective strip placed on a silicon substrate, as well as an anode-grid assembly (AGA), which is also formed on a silicon basis.

Keywords: vacuum microelectronics, cold cathode, silicon mesh, triode

UDC: 621.385.3

Received: 18.04.2025
Revised: 15.06.2025
Accepted: 21.06.2025

DOI: 10.47928/1726-9946-2025-25-2-25-36



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© Steklov Math. Inst. of RAS, 2026